Atmospheric pressure glow discharge is a plasma generation technique that has been widely applied in various fields, such as thin film deposition and polymer powder treatment. This technique was first reported by Kojima et al. in 1987 using helium and dielectric barrier discharge (DBD). Since then, various gases, including argon and nitrogen, have been used to generate uniform plasma. The technique is particularly effective for surface treatment of engineering plastics that are difficult to process with conventional corona discharge. Over time, various electrode configurations have been developed, including flat, cylindrical, fine tube, afterglow, and hollow electrode types. Atmospheric pressure glow discharge is generated by controlling the discharge gap and applying high voltage or current pulses. For example, using a dielectric layer between electrodes and applying a high-frequency voltage can result in short pulse discharges. In helium-based glow discharge, the ionization energy is relatively low, allowing for a low breakdown electric field. This enables efficient particle diffusion and makes the discharge more likely to glow. The discharge emits visible light due to the excitation of helium atoms and other molecules, such as oxygen. In atmospheric pressure glow discharge, mixing process gases with helium can enable radical and polymerization reactions. The high metastable energy of helium and argon atoms allows for efficient dissociation of process gases, facilitating subsequent chemical reactions. Atmospheric pressure glow discharge has been applied in silica film deposition and polymer powder oxidation. Silica films can be deposited using organic metal compounds, and the deposited films are transparent to visible light. Polymer powder oxidation using O₂/He plasma increases the oxygen-to-carbon ratio on the surface, enhancing its hydrophilicity and dispersibility in water. Atmospheric pressure glow discharge is a promising technology with many potential applications in various fields.Atmospheric pressure glow discharge is a plasma generation technique that has been widely applied in various fields, such as thin film deposition and polymer powder treatment. This technique was first reported by Kojima et al. in 1987 using helium and dielectric barrier discharge (DBD). Since then, various gases, including argon and nitrogen, have been used to generate uniform plasma. The technique is particularly effective for surface treatment of engineering plastics that are difficult to process with conventional corona discharge. Over time, various electrode configurations have been developed, including flat, cylindrical, fine tube, afterglow, and hollow electrode types. Atmospheric pressure glow discharge is generated by controlling the discharge gap and applying high voltage or current pulses. For example, using a dielectric layer between electrodes and applying a high-frequency voltage can result in short pulse discharges. In helium-based glow discharge, the ionization energy is relatively low, allowing for a low breakdown electric field. This enables efficient particle diffusion and makes the discharge more likely to glow. The discharge emits visible light due to the excitation of helium atoms and other molecules, such as oxygen. In atmospheric pressure glow discharge, mixing process gases with helium can enable radical and polymerization reactions. The high metastable energy of helium and argon atoms allows for efficient dissociation of process gases, facilitating subsequent chemical reactions. Atmospheric pressure glow discharge has been applied in silica film deposition and polymer powder oxidation. Silica films can be deposited using organic metal compounds, and the deposited films are transparent to visible light. Polymer powder oxidation using O₂/He plasma increases the oxygen-to-carbon ratio on the surface, enhancing its hydrophilicity and dispersibility in water. Atmospheric pressure glow discharge is a promising technology with many potential applications in various fields.