特 集 大気圧プラズマの生成と応用——1 総 論

特 集 大気圧プラズマの生成と応用——1 総 論

2006年 | 小駒 益弘
The article discusses the generation and application of atmospheric pressure glow discharge plasma, focusing on its use in surface treatment, silica film deposition, and polymer powder processing. It begins by tracing the history of atmospheric pressure glow discharge, starting with the 1987 report by Komma et al. using helium and dielectric barrier discharge (DBD) for processing. Over time, various electrode configurations have been developed, including tubular, atmospheric jet, and hollow electrode types. The article explains how atmospheric pressure glow discharge is generated, emphasizing methods such as using dielectrics to limit discharge duration and high-voltage pulses to prevent arc formation. It also highlights the unique properties of helium, such as its low ionization energy and ability to sustain glow discharge, which make it suitable for plasma generation. The article describes the optical characteristics of helium plasma, including visible light emission from excited states of helium and oxygen. It then covers applications, such as silica film deposition using TEOS and HMDSO under atmospheric pressure, resulting in dense, transparent films. Additionally, it discusses the oxidation of polymer powders, like polyethylene, using O2/He plasma, which significantly improves their hydrophilicity and dispersibility in water. The article concludes by highlighting the potential of atmospheric pressure plasma as a promising and evolving technology.The article discusses the generation and application of atmospheric pressure glow discharge plasma, focusing on its use in surface treatment, silica film deposition, and polymer powder processing. It begins by tracing the history of atmospheric pressure glow discharge, starting with the 1987 report by Komma et al. using helium and dielectric barrier discharge (DBD) for processing. Over time, various electrode configurations have been developed, including tubular, atmospheric jet, and hollow electrode types. The article explains how atmospheric pressure glow discharge is generated, emphasizing methods such as using dielectrics to limit discharge duration and high-voltage pulses to prevent arc formation. It also highlights the unique properties of helium, such as its low ionization energy and ability to sustain glow discharge, which make it suitable for plasma generation. The article describes the optical characteristics of helium plasma, including visible light emission from excited states of helium and oxygen. It then covers applications, such as silica film deposition using TEOS and HMDSO under atmospheric pressure, resulting in dense, transparent films. Additionally, it discusses the oxidation of polymer powders, like polyethylene, using O2/He plasma, which significantly improves their hydrophilicity and dispersibility in water. The article concludes by highlighting the potential of atmospheric pressure plasma as a promising and evolving technology.
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