A Review: High-Precision Angle Measurement Technologies

A Review: High-Precision Angle Measurement Technologies

8 March 2024 | Shengtong Wang, Rui Ma, Feifan Cao, Linbin Luo, Xinghui Li
This article reviews high-precision angle measurement technologies, focusing on single-axis and multi-axis measurement schemes. Single-axis measurements are primarily achieved through optical methods, such as encoder discs and interferometric phase changes, with interferometric methods offering the highest accuracy but at a higher cost. Mechanical, electromagnetic, and inertial methods are also discussed, each with its own advantages and limitations. Multi-axis measurements rely on autocollimation instruments, including plane mirrors, gratings, and self-designed targets. Grating encoders can achieve three degrees of freedom in angle measurement but have limitations in measurement range and sensitivity compared to self-designed targets. The integration of artificial intelligence and big data analysis is increasingly being used to improve the accuracy and efficiency of angle measurements. The article aims to provide readers with a comprehensive understanding of the current state of angle measurement technologies and help them choose suitable solutions based on their specific application requirements, such as single/multiple axes, accuracy level, measuring range, and budget.This article reviews high-precision angle measurement technologies, focusing on single-axis and multi-axis measurement schemes. Single-axis measurements are primarily achieved through optical methods, such as encoder discs and interferometric phase changes, with interferometric methods offering the highest accuracy but at a higher cost. Mechanical, electromagnetic, and inertial methods are also discussed, each with its own advantages and limitations. Multi-axis measurements rely on autocollimation instruments, including plane mirrors, gratings, and self-designed targets. Grating encoders can achieve three degrees of freedom in angle measurement but have limitations in measurement range and sensitivity compared to self-designed targets. The integration of artificial intelligence and big data analysis is increasingly being used to improve the accuracy and efficiency of angle measurements. The article aims to provide readers with a comprehensive understanding of the current state of angle measurement technologies and help them choose suitable solutions based on their specific application requirements, such as single/multiple axes, accuracy level, measuring range, and budget.
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