SEPTEMBER 2007 | Santosh Devasia, Senior Member, IEEE, Evangelos Eleftheriou, Fellow, IEEE, and S. O. Reza Moheimani, Senior Member, IEEE
This paper reviews the control issues in nanopositioning, focusing on the role of advanced control techniques in improving precision, accuracy, and speed of nanopositioning systems. Nanopositioning is essential in various applications, including scanning probe microscopy (SPM), dual-stage servo systems for hard disk drives (HDDs), and nanotechnology. The paper discusses the key challenges in nanopositioning, such as high resolution, high bandwidth, and robust control designs. It also reviews the use of various actuators and sensors in nanopositioning, including piezoelectric, magnetostrictive, electrostatic, and MEMS-based actuators. The paper highlights the importance of accurate position sensing and feedback control in nanopositioning systems. It also discusses the challenges in controlling piezoelectric actuators, such as creep and hysteresis, and presents models for these phenomena. The paper concludes with a review of current control techniques and emerging issues in nanopositioning.This paper reviews the control issues in nanopositioning, focusing on the role of advanced control techniques in improving precision, accuracy, and speed of nanopositioning systems. Nanopositioning is essential in various applications, including scanning probe microscopy (SPM), dual-stage servo systems for hard disk drives (HDDs), and nanotechnology. The paper discusses the key challenges in nanopositioning, such as high resolution, high bandwidth, and robust control designs. It also reviews the use of various actuators and sensors in nanopositioning, including piezoelectric, magnetostrictive, electrostatic, and MEMS-based actuators. The paper highlights the importance of accurate position sensing and feedback control in nanopositioning systems. It also discusses the challenges in controlling piezoelectric actuators, such as creep and hysteresis, and presents models for these phenomena. The paper concludes with a review of current control techniques and emerging issues in nanopositioning.