A Survey of Control Issues in Nanopositioning

A Survey of Control Issues in Nanopositioning

SEPTEMBER 2007 | Santosh Devasia, Senior Member, IEEE, Evangelos Eleftheriou, Fellow, IEEE, and S. O. Reza Moheimani, Senior Member, IEEE
This paper provides an overview of nanopositioning technologies and devices, emphasizing the critical role of advanced control techniques in enhancing precision, accuracy, and speed. Nanopositioning is essential in various applications, including scanning probe microscopy (SPM), hard disk drives (HDDs), and molecular biology. The paper discusses the key challenges in nanopositioning, such as high-resolution positioning, bandwidth, and robust control designs. It reviews the control issues in SPMs, particularly atomic force microscopy (AFM), and dual-stage servo systems for HDDs. The paper also explores the types of actuators and sensors used in nanopositioning, focusing on piezoelectric actuators due to their widespread use. It delves into the modeling and control of piezoelectric actuators, addressing issues like creep and hysteresis, and presents control strategies to mitigate these effects. The paper concludes with a discussion on emerging issues in nanopositioning and the potential for future advancements.This paper provides an overview of nanopositioning technologies and devices, emphasizing the critical role of advanced control techniques in enhancing precision, accuracy, and speed. Nanopositioning is essential in various applications, including scanning probe microscopy (SPM), hard disk drives (HDDs), and molecular biology. The paper discusses the key challenges in nanopositioning, such as high-resolution positioning, bandwidth, and robust control designs. It reviews the control issues in SPMs, particularly atomic force microscopy (AFM), and dual-stage servo systems for HDDs. The paper also explores the types of actuators and sensors used in nanopositioning, focusing on piezoelectric actuators due to their widespread use. It delves into the modeling and control of piezoelectric actuators, addressing issues like creep and hysteresis, and presents control strategies to mitigate these effects. The paper concludes with a discussion on emerging issues in nanopositioning and the potential for future advancements.
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