The article reviews the advancements in three-dimensional (3D) silicon-based lithium-ion microbatteries, highlighting their potential in miniaturizing portable and smart devices. The performance of these microbatteries is enhanced by using silicon as a high-capacity anode material. The review covers material compatibility, cell designs, fabrication methods, and performance in various applications. It emphasizes the relationship between device architecture and performance and compares different fabrication technologies. The article also suggests future research directions to further improve 3D silicon-based lithium-ion microbatteries. Key challenges include optimizing the anode material, improving the electrolyte, and enhancing the fabrication process for mass production. The importance of 3D structures in increasing the electrochemically active surface area and managing volume expansion is discussed, along with the fabrication methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and 3D printing. The article concludes by outlining the need for further research to address remaining challenges and improve the overall performance of 3D silicon-based microbatteries.The article reviews the advancements in three-dimensional (3D) silicon-based lithium-ion microbatteries, highlighting their potential in miniaturizing portable and smart devices. The performance of these microbatteries is enhanced by using silicon as a high-capacity anode material. The review covers material compatibility, cell designs, fabrication methods, and performance in various applications. It emphasizes the relationship between device architecture and performance and compares different fabrication technologies. The article also suggests future research directions to further improve 3D silicon-based lithium-ion microbatteries. Key challenges include optimizing the anode material, improving the electrolyte, and enhancing the fabrication process for mass production. The importance of 3D structures in increasing the electrochemically active surface area and managing volume expansion is discussed, along with the fabrication methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and 3D printing. The article concludes by outlining the need for further research to address remaining challenges and improve the overall performance of 3D silicon-based microbatteries.