28 February 2024 | Lu Li, Qin Qin Wang, Fan Fan Wu, Qiao Ling Xu, Jin Peng Tian, Zhi Heng Huang, Qing He Wang, Xuan Zhao, Qing Hua Zhang, Qinkai Fan, Xiu Zhen Li, Yalin Peng, Yang Kun Zhang, Kun Shan Ji, Ao Miao Zhi, Hua Cong Sun, Ming Tong Zhu, Jun Dong Zhu, Nian Peng Lu, Ying Lu, Shuo Pei Wang, Xue Dong Bai, Yang Xu, Wei Yang, Na Li, Dong Xia Shi, Le De Xian, Kai Hui Liu, Luo Jun Du & Guang Yu Zhang
This study demonstrates the successful epitaxial growth of 2-inch single-crystal MoS₂ monolayers on industry-compatible c-plane sapphire substrates by controlling the S/MoO₃ precursor ratio. The unidirectional alignment and seamless stitching of MoS₂ domains across the entire wafer are achieved through multi-scale characterizations, ranging from atomic to centimeter scales. The resulting monolayer MoS₂ single crystals exhibit high wafer-scale uniformity and state-of-the-art quality, as evidenced by excellent phonon circular dichroism, exciton valley polarization, room-temperature mobility, and on/off ratio. This work provides a simple strategy for producing wafer-scale single-crystal 2D semiconductors on commercial insulator substrates, paving the way for the extension of Moore's law and industrial applications of 2D electronic circuits.This study demonstrates the successful epitaxial growth of 2-inch single-crystal MoS₂ monolayers on industry-compatible c-plane sapphire substrates by controlling the S/MoO₃ precursor ratio. The unidirectional alignment and seamless stitching of MoS₂ domains across the entire wafer are achieved through multi-scale characterizations, ranging from atomic to centimeter scales. The resulting monolayer MoS₂ single crystals exhibit high wafer-scale uniformity and state-of-the-art quality, as evidenced by excellent phonon circular dichroism, exciton valley polarization, room-temperature mobility, and on/off ratio. This work provides a simple strategy for producing wafer-scale single-crystal 2D semiconductors on commercial insulator substrates, paving the way for the extension of Moore's law and industrial applications of 2D electronic circuits.