21 March 2024 | Hailong Yu, Zhenqing Hu, Juan He, Yijun Ran, Yang Zhao, Zhi Yu & Kaiping Tai
A flexible dual-parameter pressure-temperature sensor based on 3D spiral thermoelectric Bi₂Te₃ films is developed, demonstrating high performance in both temperature and pressure sensing. The Bi₂Te₃ film has a (OOO1) texture, with a high Seebeck coefficient of -181 μV K⁻¹ and a piezoresistance gauge factor of approximately -9.2. The sensor achieves a record-high temperature-sensing sensitivity of -426.4 μV K⁻¹ and a rapid response time of 0.95 s, outperforming most previous studies. The 3D spiral structure enhances the sensor's ability to detect pressure, with a sensitivity of 120 Pa⁻¹. The sensor uses the thermoelectric effect for temperature sensing and the piezoresistive effect for pressure sensing, enabling dual-parameter detection. The sensor is highly flexible, with excellent stability even after 1000 bending cycles. A 3×3 sensor array is developed for spatial mapping of temperature and pressure, showing potential for applications in e-skin and wearable electronics. The sensor's performance is validated through various tests, including temperature and pressure sensing, flexibility, and resolution. The study highlights the potential of Bi₂Te₃ films in flexible electronics, offering a new approach for multifunctional sensors. The sensor's design and fabrication method provide insights for future applications in flexible and stretchable devices.A flexible dual-parameter pressure-temperature sensor based on 3D spiral thermoelectric Bi₂Te₃ films is developed, demonstrating high performance in both temperature and pressure sensing. The Bi₂Te₃ film has a (OOO1) texture, with a high Seebeck coefficient of -181 μV K⁻¹ and a piezoresistance gauge factor of approximately -9.2. The sensor achieves a record-high temperature-sensing sensitivity of -426.4 μV K⁻¹ and a rapid response time of 0.95 s, outperforming most previous studies. The 3D spiral structure enhances the sensor's ability to detect pressure, with a sensitivity of 120 Pa⁻¹. The sensor uses the thermoelectric effect for temperature sensing and the piezoresistive effect for pressure sensing, enabling dual-parameter detection. The sensor is highly flexible, with excellent stability even after 1000 bending cycles. A 3×3 sensor array is developed for spatial mapping of temperature and pressure, showing potential for applications in e-skin and wearable electronics. The sensor's performance is validated through various tests, including temperature and pressure sensing, flexibility, and resolution. The study highlights the potential of Bi₂Te₃ films in flexible electronics, offering a new approach for multifunctional sensors. The sensor's design and fabrication method provide insights for future applications in flexible and stretchable devices.