21 March 2024 | Hailong Yu, Zhenqing Hu, Juan He, Yijun Ran, Yang Zhao, Zhi Yu & Kaiping Tai
This study presents a flexible, dual-parameter pressure-temperature sensor based on three-dimensional (3D) spiral thermoelectric (TE) Bi₂Te₃ films. The Bi₂Te₃ film, with a (0001) texture, exhibits excellent thermoelectric properties, including a maximum Seebeck coefficient of ~181 μV K⁻¹ and a piezoresistance gauge factor of approximately -9.2. The device demonstrates superior temperature-sensing performance with a high sensitivity of ~426.4 μV K⁻¹ and a rapid response time of ~0.95 s. Additionally, the 3D-spiral structure of the Bi₂Te₃ film allows for significant pressure-sensing properties, with a sensitivity of 120 Pa⁻¹. The sensor's performance is further enhanced by its flexibility, making it suitable for applications such as electronic skin (e-skin). The study also reports the development of 3 × 3 bimodal sensor arrays for detecting temperature and pressure maps, showcasing the potential for practical applications in wearable electronics.This study presents a flexible, dual-parameter pressure-temperature sensor based on three-dimensional (3D) spiral thermoelectric (TE) Bi₂Te₃ films. The Bi₂Te₃ film, with a (0001) texture, exhibits excellent thermoelectric properties, including a maximum Seebeck coefficient of ~181 μV K⁻¹ and a piezoresistance gauge factor of approximately -9.2. The device demonstrates superior temperature-sensing performance with a high sensitivity of ~426.4 μV K⁻¹ and a rapid response time of ~0.95 s. Additionally, the 3D-spiral structure of the Bi₂Te₃ film allows for significant pressure-sensing properties, with a sensitivity of 120 Pa⁻¹. The sensor's performance is further enhanced by its flexibility, making it suitable for applications such as electronic skin (e-skin). The study also reports the development of 3 × 3 bimodal sensor arrays for detecting temperature and pressure maps, showcasing the potential for practical applications in wearable electronics.