This work presents a method for generating high-rate and high-fidelity remote entanglement between neutral atom quantum processors using an optical cavity. The approach involves loading a large number of ytterbium (Yb) atoms into a single cavity and using local light shifts to control their coupling, which allows for efficient entanglement generation. A twisted ring cavity geometry is employed to suppress errors and enable high-fidelity entanglement. The study estimates a spin-photon entanglement rate of 5×10⁵ s⁻¹ and a Bell pair rate of 1.0×10⁵ s⁻¹ with an average fidelity near 0.999. The photon detection times provide soft information about error locations, which can improve logical qubit performance. The approach enables scalable modular quantum computing using neutral Yb atoms. The modular interface uses an optical tweezer array to place atoms into a cavity, and the entanglement process involves sequential excitation and measurement of atoms. The cavity design allows for high optical access and spatially uniform atom-cavity coupling. The study also discusses error sources and their mitigation, showing that the fidelity of individual Bell pairs is strongly influenced by photon detection times and the timing of the entanglement generation. The results demonstrate a practical path to scalable modular quantum computing with neutral Yb atoms.This work presents a method for generating high-rate and high-fidelity remote entanglement between neutral atom quantum processors using an optical cavity. The approach involves loading a large number of ytterbium (Yb) atoms into a single cavity and using local light shifts to control their coupling, which allows for efficient entanglement generation. A twisted ring cavity geometry is employed to suppress errors and enable high-fidelity entanglement. The study estimates a spin-photon entanglement rate of 5×10⁵ s⁻¹ and a Bell pair rate of 1.0×10⁵ s⁻¹ with an average fidelity near 0.999. The photon detection times provide soft information about error locations, which can improve logical qubit performance. The approach enables scalable modular quantum computing using neutral Yb atoms. The modular interface uses an optical tweezer array to place atoms into a cavity, and the entanglement process involves sequential excitation and measurement of atoms. The cavity design allows for high optical access and spatially uniform atom-cavity coupling. The study also discusses error sources and their mitigation, showing that the fidelity of individual Bell pairs is strongly influenced by photon detection times and the timing of the entanglement generation. The results demonstrate a practical path to scalable modular quantum computing with neutral Yb atoms.