The paper presents a novel method for assembling and maintaining large arrays of individually addressable atoms, crucial for scaling neutral-atom-based quantum computers and simulators. The approach combines optical tweezers and cavity-enhanced optical lattices to create a synergistic system that allows for the incremental filling of a target array from a reservoir. This method enables near-deterministic filling (99% per-site occupancy) of 1225-site arrays of optical traps, with the ability to maintain the array indefinitely by repeatedly filling the reservoir. The use of cavity-enhanced lattices enhances the power efficiency of generating traps for imaging, reducing the power requirements by two orders of magnitude compared to optical tweezers. The protocol is compatible with mid-circuit reloading of atoms, which is essential for error-corrected quantum computations. The authors demonstrate the feasibility of this method through detailed experimental procedures and characterizations, including the use of a core-shell MOT to minimize light scattering and a high-finesse XY and Z cavity to achieve tight three-dimensional confinement. The paper also discusses the challenges and potential improvements in the system, such as reducing vacuum losses and optimizing the rearrangement process.The paper presents a novel method for assembling and maintaining large arrays of individually addressable atoms, crucial for scaling neutral-atom-based quantum computers and simulators. The approach combines optical tweezers and cavity-enhanced optical lattices to create a synergistic system that allows for the incremental filling of a target array from a reservoir. This method enables near-deterministic filling (99% per-site occupancy) of 1225-site arrays of optical traps, with the ability to maintain the array indefinitely by repeatedly filling the reservoir. The use of cavity-enhanced lattices enhances the power efficiency of generating traps for imaging, reducing the power requirements by two orders of magnitude compared to optical tweezers. The protocol is compatible with mid-circuit reloading of atoms, which is essential for error-corrected quantum computations. The authors demonstrate the feasibility of this method through detailed experimental procedures and characterizations, including the use of a core-shell MOT to minimize light scattering and a high-finesse XY and Z cavity to achieve tight three-dimensional confinement. The paper also discusses the challenges and potential improvements in the system, such as reducing vacuum losses and optimizing the rearrangement process.