This study proposes a Marangoni-driven deterministic formation approach to fabricate hollow microstructures, which enhance the sensitivity of flexible pressure sensors. The method involves fluid convective deposition during the drying process of a polymer solution, allowing solute particles to reassemble and form cavities within the microstructures. The interior cavity can be controlled to have a void ratio exceeding 90%, providing greater deformation and resistance to structural stiffening during compression. The hollow micro-pyramid (HMP) sensor exhibits a 10-fold improvement in sensitivity over solid micro-pyramids across a wider pressure range, with an ultra-low detect limit of 0.21 Pa. The HMP-enhanced sensor is also characterized by its fast response time and stability, making it suitable for robotic tactile and epidermal devices. The fabrication process is simple, scalable, and large-area compatible, making it a promising strategy for enhancing the performance of various types of sensors.This study proposes a Marangoni-driven deterministic formation approach to fabricate hollow microstructures, which enhance the sensitivity of flexible pressure sensors. The method involves fluid convective deposition during the drying process of a polymer solution, allowing solute particles to reassemble and form cavities within the microstructures. The interior cavity can be controlled to have a void ratio exceeding 90%, providing greater deformation and resistance to structural stiffening during compression. The hollow micro-pyramid (HMP) sensor exhibits a 10-fold improvement in sensitivity over solid micro-pyramids across a wider pressure range, with an ultra-low detect limit of 0.21 Pa. The HMP-enhanced sensor is also characterized by its fast response time and stability, making it suitable for robotic tactile and epidermal devices. The fabrication process is simple, scalable, and large-area compatible, making it a promising strategy for enhancing the performance of various types of sensors.