This study presents a novel method for 3D printing of sub-micron features in fused silica glass using one-photon micro-stereolithography (μSL). The technique bridges the gap between macro and nano scales by fabricating transparent and high-performance fused silica glass components with complex, 3D sub-micron architectures. The process involves engineering a suitable nanocomposite precursor and utilizing μSL to create intricate structures with high resolution and precision. Comprehensive characterizations confirm that the final material is stoichiometrically pure silica with high quality, defect-free morphology, and excellent optical properties. Homogeneous volumetric shrinkage further enhances the smallest voxel size, reducing it from 2.0 × 2.0 × 1.0 μm³ to 0.8 × 0.8 × 0.5 μm³. This approach can produce fused silica glass components with various 3D geometries featuring sub-micron details and millimeter dimensions, making it promising for applications in micro-optics, microfluidics, mechanical metamaterials, and engineered surfaces. The study demonstrates the potential of μSL in fabricating sophisticated micro-architectures with exceptional transparency, mechanical properties, and chemical resistance, offering a significant advancement in the field of 3D printing for glass materials.This study presents a novel method for 3D printing of sub-micron features in fused silica glass using one-photon micro-stereolithography (μSL). The technique bridges the gap between macro and nano scales by fabricating transparent and high-performance fused silica glass components with complex, 3D sub-micron architectures. The process involves engineering a suitable nanocomposite precursor and utilizing μSL to create intricate structures with high resolution and precision. Comprehensive characterizations confirm that the final material is stoichiometrically pure silica with high quality, defect-free morphology, and excellent optical properties. Homogeneous volumetric shrinkage further enhances the smallest voxel size, reducing it from 2.0 × 2.0 × 1.0 μm³ to 0.8 × 0.8 × 0.5 μm³. This approach can produce fused silica glass components with various 3D geometries featuring sub-micron details and millimeter dimensions, making it promising for applications in micro-optics, microfluidics, mechanical metamaterials, and engineered surfaces. The study demonstrates the potential of μSL in fabricating sophisticated micro-architectures with exceptional transparency, mechanical properties, and chemical resistance, offering a significant advancement in the field of 3D printing for glass materials.