1 July 1996 | J. Schwan, S. Ulrich, V. Batori, and H. Ehrhardt; S. R. P. Silva
This paper discusses the Raman spectroscopy of amorphous (hydrogenated) carbon films, focusing on the interpretation of Raman features in the 1000-1700 cm⁻¹ range. The study examines the linewidths, positions of the "G" graphite peak and "D" disordered peak, and their intensity ratios. It shows that even small clusters of condensed benzene rings (less than 20 Å) can explain the observed Raman scattering. The utility of Raman scattering in estimating cluster sizes in amorphous carbon films is discussed. Carbon films prepared by magnetron sputtering show two additional Raman features at 1180 and 1490 cm⁻¹, in addition to the G and D peaks. The 1180 cm⁻¹ peak is correlated with the sp³ content in the films.
The paper reviews the historical context of Raman spectroscopy in characterizing carbon films, including the identification of the G and D peaks in graphite and amorphous carbon. It discusses the possible interpretations of these peaks, including contributions from sp² bonding and phonon density of states. The paper also explores the influence of cluster size, distribution, stress, and chemical bonding on the broadening of the G linewidth. The ratio of the D to G peak intensities (ID/IG) is shown to be a useful indicator of cluster sizes in amorphous carbon films. The position of the G peak is influenced by hydrogen content, stress, and the superposition of different Raman modes. The 1180 cm⁻¹ Raman feature is correlated with the sp³ content in carbon films prepared by magnetron sputtering combined with Ar ion plating. The paper concludes that Raman spectroscopy is a valuable tool for characterizing amorphous carbon films, but careful interpretation is required due to the complexity of the spectra. The study highlights the importance of considering multiple factors, including cluster size, distribution, and stress, in interpreting Raman data for amorphous carbon films.This paper discusses the Raman spectroscopy of amorphous (hydrogenated) carbon films, focusing on the interpretation of Raman features in the 1000-1700 cm⁻¹ range. The study examines the linewidths, positions of the "G" graphite peak and "D" disordered peak, and their intensity ratios. It shows that even small clusters of condensed benzene rings (less than 20 Å) can explain the observed Raman scattering. The utility of Raman scattering in estimating cluster sizes in amorphous carbon films is discussed. Carbon films prepared by magnetron sputtering show two additional Raman features at 1180 and 1490 cm⁻¹, in addition to the G and D peaks. The 1180 cm⁻¹ peak is correlated with the sp³ content in the films.
The paper reviews the historical context of Raman spectroscopy in characterizing carbon films, including the identification of the G and D peaks in graphite and amorphous carbon. It discusses the possible interpretations of these peaks, including contributions from sp² bonding and phonon density of states. The paper also explores the influence of cluster size, distribution, stress, and chemical bonding on the broadening of the G linewidth. The ratio of the D to G peak intensities (ID/IG) is shown to be a useful indicator of cluster sizes in amorphous carbon films. The position of the G peak is influenced by hydrogen content, stress, and the superposition of different Raman modes. The 1180 cm⁻¹ Raman feature is correlated with the sp³ content in carbon films prepared by magnetron sputtering combined with Ar ion plating. The paper concludes that Raman spectroscopy is a valuable tool for characterizing amorphous carbon films, but careful interpretation is required due to the complexity of the spectra. The study highlights the importance of considering multiple factors, including cluster size, distribution, and stress, in interpreting Raman data for amorphous carbon films.