Recent Advances in Mechanical Micromachining

Recent Advances in Mechanical Micromachining

2006 | D. Dornfeld, S. Min, Y. Takeuchi
This paper reviews the advancements and future requirements in the field of micromachining, focusing on the creation of precise two and three-dimensional workpieces with dimensions ranging from a few tens of nanometers to a few millimeters. The review covers topics such as process physics, including materials and microstructural effects, machine tools, tooling and sensing, workpiece and design issues, software and simulation tools, and surface and edge finish. The authors highlight the importance of understanding the fundamental process physics, modeling efforts, experimental validation, and machine tool development. They also discuss the challenges and opportunities in micromachining, particularly in the context of societal, sensing, and process intelligence, reconfigurability, and modeling. The paper emphasizes the need for further research to improve the quality and accuracy of micromachining processes, especially in the realm of micro-scale structures in brittle materials. Additionally, it explores the role of micromolding in generating small parts with 3D convex shapes and the importance of tooling precision in micro-mass production technologies.This paper reviews the advancements and future requirements in the field of micromachining, focusing on the creation of precise two and three-dimensional workpieces with dimensions ranging from a few tens of nanometers to a few millimeters. The review covers topics such as process physics, including materials and microstructural effects, machine tools, tooling and sensing, workpiece and design issues, software and simulation tools, and surface and edge finish. The authors highlight the importance of understanding the fundamental process physics, modeling efforts, experimental validation, and machine tool development. They also discuss the challenges and opportunities in micromachining, particularly in the context of societal, sensing, and process intelligence, reconfigurability, and modeling. The paper emphasizes the need for further research to improve the quality and accuracy of micromachining processes, especially in the realm of micro-scale structures in brittle materials. Additionally, it explores the role of micromolding in generating small parts with 3D convex shapes and the importance of tooling precision in micro-mass production technologies.
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