Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors

Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors

7 February 2024 | Ye Chen, Dongqin Lu, Huan Xing, Haotian Ding, Junxian Luo, Hanwen Liu, Xiangxu Kong and Fei Xu
This review summarizes recent progress in MEMS fiber-optic Fabry–Perot (FP) pressure sensors. These sensors are increasingly used in industrial applications due to their advantages over conventional electronic sensors, such as resistance to electromagnetic interference, flexibility, and corrosion resistance. The review discusses the basic principles of MEMS fiber-optic FP pressure sensors, their operation based on different materials, and their industrial applications. It also highlights recent advancements, such as two-photon polymerization-based 3D printing technology and sapphire-based sensors that operate up to 1200°C. The review discusses the limitations and opportunities for future development. MEMS fiber-optic FP pressure sensors work by converting external pressure changes into FP cavity length changes through a sensitive diaphragm. The interference of light reflected from the inner surface of the diaphragm and the end face of the fiber creates an interference pattern that is used to measure pressure. The sensitivity of the sensor is influenced by the shape, diameter, thickness, and hardness of the diaphragm. To improve sensitivity, methods such as increasing the sensing area, using more flexible materials, and thinning the diaphragm are employed. The review discusses different materials used for the diaphragm, including silica, silicon, sapphire, SiC, diamond, polymers, and 2D materials. Each material has its own advantages and challenges. Silica diaphragms are compatible with fiber-optic processes and offer high temperature and permeation resistance. Silicon, SiC, and diamond-based diaphragms can be processed using MEMS techniques and are suitable for mass production. Sapphire diaphragms can operate at extremely high temperatures. Polymer-based films can achieve high sensitivity, while 2D materials can increase sensitivity by orders of magnitude. The review also discusses the applications of these sensors in various fields, including aerodynamic measurement, nuclear power plants, underwater applications, and medicine and healthcare. In aerodynamic measurement, these sensors are used for airflow velocity and pressure measurement. In nuclear power plants, they are used for monitoring steam generator tube rupture. In underwater applications, they are used for pressure measurement in seawater. In medicine and healthcare, they are used for intracranial, intraocular, and intravascular pressure monitoring. The review concludes that MEMS fiber-optic FP pressure sensors have great application potential in many areas. However, there are still challenges that need to be addressed, such as the fabrication and bonding of diaphragms, packaging for harsh environments, cross-error compensation, and the development of more device materials. Future directions include further development of processing and bonding technologies, packaging technology, cross-error compensation, and interrogation technology.This review summarizes recent progress in MEMS fiber-optic Fabry–Perot (FP) pressure sensors. These sensors are increasingly used in industrial applications due to their advantages over conventional electronic sensors, such as resistance to electromagnetic interference, flexibility, and corrosion resistance. The review discusses the basic principles of MEMS fiber-optic FP pressure sensors, their operation based on different materials, and their industrial applications. It also highlights recent advancements, such as two-photon polymerization-based 3D printing technology and sapphire-based sensors that operate up to 1200°C. The review discusses the limitations and opportunities for future development. MEMS fiber-optic FP pressure sensors work by converting external pressure changes into FP cavity length changes through a sensitive diaphragm. The interference of light reflected from the inner surface of the diaphragm and the end face of the fiber creates an interference pattern that is used to measure pressure. The sensitivity of the sensor is influenced by the shape, diameter, thickness, and hardness of the diaphragm. To improve sensitivity, methods such as increasing the sensing area, using more flexible materials, and thinning the diaphragm are employed. The review discusses different materials used for the diaphragm, including silica, silicon, sapphire, SiC, diamond, polymers, and 2D materials. Each material has its own advantages and challenges. Silica diaphragms are compatible with fiber-optic processes and offer high temperature and permeation resistance. Silicon, SiC, and diamond-based diaphragms can be processed using MEMS techniques and are suitable for mass production. Sapphire diaphragms can operate at extremely high temperatures. Polymer-based films can achieve high sensitivity, while 2D materials can increase sensitivity by orders of magnitude. The review also discusses the applications of these sensors in various fields, including aerodynamic measurement, nuclear power plants, underwater applications, and medicine and healthcare. In aerodynamic measurement, these sensors are used for airflow velocity and pressure measurement. In nuclear power plants, they are used for monitoring steam generator tube rupture. In underwater applications, they are used for pressure measurement in seawater. In medicine and healthcare, they are used for intracranial, intraocular, and intravascular pressure monitoring. The review concludes that MEMS fiber-optic FP pressure sensors have great application potential in many areas. However, there are still challenges that need to be addressed, such as the fabrication and bonding of diaphragms, packaging for harsh environments, cross-error compensation, and the development of more device materials. Future directions include further development of processing and bonding technologies, packaging technology, cross-error compensation, and interrogation technology.
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[slides and audio] Recent Progress in MEMS Fiber-Optic Fabry%E2%80%93Perot Pressure Sensors