2024 | Ye Chen, Dongqin Lu, Huan Xing, Haotian Ding, Junxian Luo, Hanwen Liu, Xiangxu Kong and Fei Xu
The article reviews the recent progress in MEMS fiber-optic Fabry–Perot (FP) pressure sensors, highlighting their basic principles, materials, and industrial applications. MEMS fiber-optic FP pressure sensors are gaining attention due to their advantages over conventional electronic sensors in harsh environments, such as anti-electromagnetic interference, flexibility, and corrosion resistance. The review covers the structure and working principle of these sensors, which convert pressure changes into FP cavity length changes through a sensitive diaphragm. It discusses various diaphragm materials, including dielectric films (silica, silicon, sapphire, SiC) and non-dielectric membranes (metals, polymers, 2D materials), each with its unique advantages and challenges. Recent advancements, such as two-photon polymerization-based 3D printing and sapphire-based sensors operating up to 1200 °C, are also introduced. The article further explores the applications of these sensors in fields like aerodynamic measurement, nuclear power plants, underwater applications, and medicine, emphasizing their potential in small size, high accuracy, and extreme environment measurements. Finally, it discusses limitations and future directions, including the need for improved fabrication and bonding technologies, packaging for harsh environments, cross-error compensation, and the development of more suitable materials and interrogation techniques.The article reviews the recent progress in MEMS fiber-optic Fabry–Perot (FP) pressure sensors, highlighting their basic principles, materials, and industrial applications. MEMS fiber-optic FP pressure sensors are gaining attention due to their advantages over conventional electronic sensors in harsh environments, such as anti-electromagnetic interference, flexibility, and corrosion resistance. The review covers the structure and working principle of these sensors, which convert pressure changes into FP cavity length changes through a sensitive diaphragm. It discusses various diaphragm materials, including dielectric films (silica, silicon, sapphire, SiC) and non-dielectric membranes (metals, polymers, 2D materials), each with its unique advantages and challenges. Recent advancements, such as two-photon polymerization-based 3D printing and sapphire-based sensors operating up to 1200 °C, are also introduced. The article further explores the applications of these sensors in fields like aerodynamic measurement, nuclear power plants, underwater applications, and medicine, emphasizing their potential in small size, high accuracy, and extreme environment measurements. Finally, it discusses limitations and future directions, including the need for improved fabrication and bonding technologies, packaging for harsh environments, cross-error compensation, and the development of more suitable materials and interrogation techniques.