Sputtering by Particle Bombardment, Experiments and Computer Calculations from Threshold to MeV Energies

Sputtering by Particle Bombardment, Experiments and Computer Calculations from Threshold to MeV Energies

2007 | R. Behrisch and W. Eckstein
This article provides an overview of sputtering, a process in which atoms are removed from a surface due to bombardment with energetic particles. Sputtering is widely used in surface analysis, thin film deposition, and surface machining. The physics behind sputtering is well understood, with computer simulations showing good agreement with experimental results. Sputtering can be categorized into physical and chemical sputtering, with the latter involving chemical bonding between incident ions and surface atoms. The sputtering yield, defined as the number of atoms removed per incident particle, varies depending on the energy and type of incident particles, as well as the target material. Sputtering occurs in different collision regimes, including the single knock-on, linear cascade, and spike regimes, each characterized by distinct energy and angular distributions of sputtered particles. The sputtering yield is influenced by the target's crystallinity, orientation, and surface topography. For crystalline targets, sputtering is affected by the lattice structure, with lower yields in close-packed directions due to increased lattice transparency. Sputtering can also be enhanced or reduced by the formation of chemical bonds or surface oxides. The sputtering yield is generally independent of the target temperature for amorphous and polycrystalline materials. For single crystals, the sputtering yield varies with temperature, with minima in close-packed directions becoming less pronounced at higher temperatures. Sputtering is used in various applications, including surface analysis, thin film deposition, and material processing. It is also observed in natural and laboratory settings, such as in space and plasma environments. Sputtering is a key process in modern technology, with applications in electronics, optics, and materials science. The article also discusses the use of computer simulations and experimental techniques to study sputtering, highlighting the importance of understanding the underlying physics for technological applications.This article provides an overview of sputtering, a process in which atoms are removed from a surface due to bombardment with energetic particles. Sputtering is widely used in surface analysis, thin film deposition, and surface machining. The physics behind sputtering is well understood, with computer simulations showing good agreement with experimental results. Sputtering can be categorized into physical and chemical sputtering, with the latter involving chemical bonding between incident ions and surface atoms. The sputtering yield, defined as the number of atoms removed per incident particle, varies depending on the energy and type of incident particles, as well as the target material. Sputtering occurs in different collision regimes, including the single knock-on, linear cascade, and spike regimes, each characterized by distinct energy and angular distributions of sputtered particles. The sputtering yield is influenced by the target's crystallinity, orientation, and surface topography. For crystalline targets, sputtering is affected by the lattice structure, with lower yields in close-packed directions due to increased lattice transparency. Sputtering can also be enhanced or reduced by the formation of chemical bonds or surface oxides. The sputtering yield is generally independent of the target temperature for amorphous and polycrystalline materials. For single crystals, the sputtering yield varies with temperature, with minima in close-packed directions becoming less pronounced at higher temperatures. Sputtering is used in various applications, including surface analysis, thin film deposition, and material processing. It is also observed in natural and laboratory settings, such as in space and plasma environments. Sputtering is a key process in modern technology, with applications in electronics, optics, and materials science. The article also discusses the use of computer simulations and experimental techniques to study sputtering, highlighting the importance of understanding the underlying physics for technological applications.
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