9 Dec 2014 | Jaemin Kim1,2,*, Mincheol Lee1,3,*, Hyung Joon Shim1,2,*, Roozbeh Ghaffari4, Hye Rim Cho1,5, Donghee Son1,2, Yei Hwan Jung6, Min Soh1,2, Changsoon Choi1,2, Sungmook Jung1,2, Kon Chu7, Daejong Jeon7, Soon-Tae Lee7, Ji Hoon Kim8, Seung Hong Choi1,5, Taeghwan Hyeon1,2 & Dae-Hyeong Kim1,2,3
This article presents a stretchable silicon nanoribbon (SiNR) electronic system for skin prosthetics, which integrates ultrathin, single-crystalline silicon nanoribbon strain, pressure, and temperature sensor arrays, along with humidity sensors, electroresistive heaters, and stretchable multi-electrode arrays for nerve stimulation. The system enables highly localized mechanical and thermal perception in response to external stimuli, offering unique opportunities for smart prosthetics and peripheral nervous system interface technologies. The SiNR sensors are designed to stretch according to the dynamic mechanical properties of the target skin segment, providing high spatio-temporal sensitivity and mechanical reliability. The system includes stretchable humidity sensors and heaters, enabling the sensation of skin moisture and body temperature regulation. Electrical stimuli can be transmitted from the prosthetic skin to the body to stimulate specific nerves via conformally contacted ultrathin stretchable nanowire-based electrodes, which are decorated with ceria nanoparticles for inflammation control.
The SiNR strain gauges exhibit a linear relationship between strain and relative resistance changes with fast response times. The sensors have been used to detect motion across various anatomical locations, such as the wrist and fingers. Stretchable metal and single crystalline silicon temperature sensors fabricated on ultrathin substrates have been applied for temperature monitoring on human skin. However, the heterogeneity in geometry and strain profiles of skin across different anatomies necessitates custom designs for specific body locations. The integration of pressure, temperature, and humidity sensing with electroresistive thermal actuation in site-specific geometrical layouts provides unique opportunities to advance smart prosthetics and artificial skin.
The SiNR mechanical sensors have site-specific sensitivity, with larger curvature sensors able to withstand greater applied strains but exhibiting reduced sensitivity. The SiNR strain gauges are mainly sensitive to longitudinal stretching. The SiNR pressure sensors have enhanced sensitivity with the inclusion of a cavity in the PI passivation layer. The SiNR temperature sensors are doped to form p-n junctions, allowing for stable temperature measurements under various stretching conditions. The SiNR temperature sensors have a linear and fast response time, and no hysteresis irrespective of designs. The SiNR temperature sensors are used to minimize the effect of mechanical deformations on temperature sensing.
The SiNR humidity sensors detect capacitance changes induced by the permittivity change of PI, which absorbs water molecules. The humidity sensor arrays detect spatial differences in humidity. The SiNR thermal actuators have a stretchable design, with thermal signature readily controllable. The heater array can maintain body temperature or be adjusted to higher temperatures. The thermal actuation performance remains intact under various stretching conditions.
The prosthetic hand and laminated electronic skin can encounter complex operations such as hand shaking, keyboard tapping, ball grasping, holding a cup of hot/cold drink, touching dry/wet surfaces, and human to human contact. The SiNR strain gauge arrays can map spatio-temporal strain. The SiNR pressure sensors show rapid and reliableThis article presents a stretchable silicon nanoribbon (SiNR) electronic system for skin prosthetics, which integrates ultrathin, single-crystalline silicon nanoribbon strain, pressure, and temperature sensor arrays, along with humidity sensors, electroresistive heaters, and stretchable multi-electrode arrays for nerve stimulation. The system enables highly localized mechanical and thermal perception in response to external stimuli, offering unique opportunities for smart prosthetics and peripheral nervous system interface technologies. The SiNR sensors are designed to stretch according to the dynamic mechanical properties of the target skin segment, providing high spatio-temporal sensitivity and mechanical reliability. The system includes stretchable humidity sensors and heaters, enabling the sensation of skin moisture and body temperature regulation. Electrical stimuli can be transmitted from the prosthetic skin to the body to stimulate specific nerves via conformally contacted ultrathin stretchable nanowire-based electrodes, which are decorated with ceria nanoparticles for inflammation control.
The SiNR strain gauges exhibit a linear relationship between strain and relative resistance changes with fast response times. The sensors have been used to detect motion across various anatomical locations, such as the wrist and fingers. Stretchable metal and single crystalline silicon temperature sensors fabricated on ultrathin substrates have been applied for temperature monitoring on human skin. However, the heterogeneity in geometry and strain profiles of skin across different anatomies necessitates custom designs for specific body locations. The integration of pressure, temperature, and humidity sensing with electroresistive thermal actuation in site-specific geometrical layouts provides unique opportunities to advance smart prosthetics and artificial skin.
The SiNR mechanical sensors have site-specific sensitivity, with larger curvature sensors able to withstand greater applied strains but exhibiting reduced sensitivity. The SiNR strain gauges are mainly sensitive to longitudinal stretching. The SiNR pressure sensors have enhanced sensitivity with the inclusion of a cavity in the PI passivation layer. The SiNR temperature sensors are doped to form p-n junctions, allowing for stable temperature measurements under various stretching conditions. The SiNR temperature sensors have a linear and fast response time, and no hysteresis irrespective of designs. The SiNR temperature sensors are used to minimize the effect of mechanical deformations on temperature sensing.
The SiNR humidity sensors detect capacitance changes induced by the permittivity change of PI, which absorbs water molecules. The humidity sensor arrays detect spatial differences in humidity. The SiNR thermal actuators have a stretchable design, with thermal signature readily controllable. The heater array can maintain body temperature or be adjusted to higher temperatures. The thermal actuation performance remains intact under various stretching conditions.
The prosthetic hand and laminated electronic skin can encounter complex operations such as hand shaking, keyboard tapping, ball grasping, holding a cup of hot/cold drink, touching dry/wet surfaces, and human to human contact. The SiNR strain gauge arrays can map spatio-temporal strain. The SiNR pressure sensors show rapid and reliable