The paper reports the successful growth of large-scale, well-aligned carbon nanotubes on nickel-coated glass at temperatures below 666°C using plasma-enhanced hot filament chemical vapor deposition (PE-HF-CVD). This method, which uses acetylene (C₂H₂) as the carbon source and ammonia (NH₃) as a catalyst and dilution gas, allows for the production of nanotubes with diameters ranging from 20 to 400 nanometers and lengths from 0.1 to 50 micrometers. The alignment of the nanotubes is crucial for applications such as cold-cathode flat panel displays and vacuum microelectronics. The study also investigates the effect of nickel layer thickness on nanotube diameter and alignment, finding that thinner nickel layers result in thinner nanotubes with less alignment. High-resolution transmission electron microscopy (HRTEM) confirms the hollow multiwalled structure of the nanotubes. The method provides a promising approach for fabricating large panels of well-aligned carbon nanotubes suitable for various applications.The paper reports the successful growth of large-scale, well-aligned carbon nanotubes on nickel-coated glass at temperatures below 666°C using plasma-enhanced hot filament chemical vapor deposition (PE-HF-CVD). This method, which uses acetylene (C₂H₂) as the carbon source and ammonia (NH₃) as a catalyst and dilution gas, allows for the production of nanotubes with diameters ranging from 20 to 400 nanometers and lengths from 0.1 to 50 micrometers. The alignment of the nanotubes is crucial for applications such as cold-cathode flat panel displays and vacuum microelectronics. The study also investigates the effect of nickel layer thickness on nanotube diameter and alignment, finding that thinner nickel layers result in thinner nanotubes with less alignment. High-resolution transmission electron microscopy (HRTEM) confirms the hollow multiwalled structure of the nanotubes. The method provides a promising approach for fabricating large panels of well-aligned carbon nanotubes suitable for various applications.