Ultrafast laser processing of materials has evolved significantly over the last decade, revealing its scientific, technological, and industrial potential. This technique uses tightly focused femtosecond or picosecond laser pulses to induce precise photomodification in sub-100-nm-sized regions through two- or multi-photon excitation, which is much faster than thermal energy exchange. State-of-the-art ultrashort laser processing techniques offer high spatial resolution (0.1–1 μm) and almost unrestricted three-dimensional structuring capabilities. Adjustable pulse duration, spatiotemporal chirp, phase front tilt, and polarization allow precise control of photomodification via a wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters per second, facilitating fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications, such as micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications, are highlighted. Ultrafast laser processing enables three-dimensional (3D) writing in glass and polymers, which has attracted attention in various academic and engineering fields. The fabrication of 3D objects with sizes comparable to living cells and finer details suggests the realization of remotely controllable 3D micro-bots for in vivo healing or all-optical information processors on a single 3D microchip. Current achievements include optical memories with data density exceeding 1 Tbit/cm³, waveguide-based optical information processing structures, elements of optical quantum computing systems, 3D photonic crystals, and micro-mechanical/biological systems. These achievements and current trends in laser processing and its applications are discussed, highlighting the potential of ultrashort laser fabrication as an indispensable tool for future nanotechnologies. Unrestricted freeform manufacturing in 3D-space on the mesoscale (10 nm to 100 μm) has been an engineering curiosity for over 10–15 years. This endeavor pushed the limits of novel 3D fabrication and experimented with optimization for higher throughput and resolution. The efforts continue today, challenging well-established benchmarks in resolution, feature size, precision, and efficiency. The difference in relevant wavelengths (electron's de Broglie wavelength vs. light wavelength) reveals the unique capabilities of ultrashort laser pulses in fabrication. Lasers have entered and now dominate fields such as welding, drilling, cladding, and manufacturing with unique capabilities of 3D robotic light delivery at a 0.1–10 m scale and pointing stability of ~1 mm. However, they are challenged in precision and resolution by reliable ultrashort pulsed lasers. A double innovation in the development of new materials and laser sources better suited for 3D microprinting is required for continued progress in laser fabrication. With the emergence of a new generation of reliable fs-lasers, aUltrafast laser processing of materials has evolved significantly over the last decade, revealing its scientific, technological, and industrial potential. This technique uses tightly focused femtosecond or picosecond laser pulses to induce precise photomodification in sub-100-nm-sized regions through two- or multi-photon excitation, which is much faster than thermal energy exchange. State-of-the-art ultrashort laser processing techniques offer high spatial resolution (0.1–1 μm) and almost unrestricted three-dimensional structuring capabilities. Adjustable pulse duration, spatiotemporal chirp, phase front tilt, and polarization allow precise control of photomodification via a wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters per second, facilitating fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications, such as micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications, are highlighted. Ultrafast laser processing enables three-dimensional (3D) writing in glass and polymers, which has attracted attention in various academic and engineering fields. The fabrication of 3D objects with sizes comparable to living cells and finer details suggests the realization of remotely controllable 3D micro-bots for in vivo healing or all-optical information processors on a single 3D microchip. Current achievements include optical memories with data density exceeding 1 Tbit/cm³, waveguide-based optical information processing structures, elements of optical quantum computing systems, 3D photonic crystals, and micro-mechanical/biological systems. These achievements and current trends in laser processing and its applications are discussed, highlighting the potential of ultrashort laser fabrication as an indispensable tool for future nanotechnologies. Unrestricted freeform manufacturing in 3D-space on the mesoscale (10 nm to 100 μm) has been an engineering curiosity for over 10–15 years. This endeavor pushed the limits of novel 3D fabrication and experimented with optimization for higher throughput and resolution. The efforts continue today, challenging well-established benchmarks in resolution, feature size, precision, and efficiency. The difference in relevant wavelengths (electron's de Broglie wavelength vs. light wavelength) reveals the unique capabilities of ultrashort laser pulses in fabrication. Lasers have entered and now dominate fields such as welding, drilling, cladding, and manufacturing with unique capabilities of 3D robotic light delivery at a 0.1–10 m scale and pointing stability of ~1 mm. However, they are challenged in precision and resolution by reliable ultrashort pulsed lasers. A double innovation in the development of new materials and laser sources better suited for 3D microprinting is required for continued progress in laser fabrication. With the emergence of a new generation of reliable fs-lasers, a