This paper presents a new surface plasmon resonance (SPR) sensor design that integrates zinc oxide (ZnO) and silicon (Si) with silver (Ag) to enhance chemical sensing. The sensor uses a BaF₂ prism and a sensing layer containing analytes. Silicon has a high refractive index, is compatible with microfabrication, and is suitable for various sensing applications. The angular interrogation method is used to analyze the Kretschmann configuration, and Sellmeier equations are used to calculate reflectivity and design parameters. The sensor shows high sensitivity for different refractive indices of sensing media, with values of 201.8°RIU, 257.85°RIU, and 311°RIU for 1.3264 (D₂O), 1.35, and 1.36 (Acetone), respectively. The figure of merit (FOM) values are 60.54/RIU, 54.66/RIU, and 70.18/RIU. The ZnO layer is compared with other prisms like CsF, NFK51A, and BK7. The proposed sensor improves performance for refractive index detection between 1.3264 and 1.36. SPR is a useful technique for sensing due to its high sensitivity to refractive index changes. Various SPR-based sensors have been developed, including photonic crystal fiber, waveguide, Mach-Zehnder interference, and prism sensors. The prism-based SPR sensor uses the Otto and Kretschmann configurations. The Kretschmann configuration is more efficient for solution applications. The sensor uses a prism with an evaporated metal coating. When illuminated, plasmons are stimulated on the exterior of the metal film. The sensor uses angular interrogation to adjust the incidence angle for phase matching and SPW excitation. The reflectance is minimal at the resonance angle, and refractive index changes affect the reflectance minimum location. The SPR active metals include gold, silver, nickel, aluminium, and copper. To improve sensitivity, Au film thickness, precise tuning, and 2D material layers like MXene, graphene, TMDCs, and BP are used. The proposed sensor integrates Ag, ZnO, and Si to enhance sensitivity. The sensor is an SPR-based chemical sensor that combines these materials.This paper presents a new surface plasmon resonance (SPR) sensor design that integrates zinc oxide (ZnO) and silicon (Si) with silver (Ag) to enhance chemical sensing. The sensor uses a BaF₂ prism and a sensing layer containing analytes. Silicon has a high refractive index, is compatible with microfabrication, and is suitable for various sensing applications. The angular interrogation method is used to analyze the Kretschmann configuration, and Sellmeier equations are used to calculate reflectivity and design parameters. The sensor shows high sensitivity for different refractive indices of sensing media, with values of 201.8°RIU, 257.85°RIU, and 311°RIU for 1.3264 (D₂O), 1.35, and 1.36 (Acetone), respectively. The figure of merit (FOM) values are 60.54/RIU, 54.66/RIU, and 70.18/RIU. The ZnO layer is compared with other prisms like CsF, NFK51A, and BK7. The proposed sensor improves performance for refractive index detection between 1.3264 and 1.36. SPR is a useful technique for sensing due to its high sensitivity to refractive index changes. Various SPR-based sensors have been developed, including photonic crystal fiber, waveguide, Mach-Zehnder interference, and prism sensors. The prism-based SPR sensor uses the Otto and Kretschmann configurations. The Kretschmann configuration is more efficient for solution applications. The sensor uses a prism with an evaporated metal coating. When illuminated, plasmons are stimulated on the exterior of the metal film. The sensor uses angular interrogation to adjust the incidence angle for phase matching and SPW excitation. The reflectance is minimal at the resonance angle, and refractive index changes affect the reflectance minimum location. The SPR active metals include gold, silver, nickel, aluminium, and copper. To improve sensitivity, Au film thickness, precise tuning, and 2D material layers like MXene, graphene, TMDCs, and BP are used. The proposed sensor integrates Ag, ZnO, and Si to enhance sensitivity. The sensor is an SPR-based chemical sensor that combines these materials.